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Applications
- Plasma Deposition/Etch
- Sputtering/PVD/RTP
- Industrial CVD/Ion Implantation
- LPCVD
- Crystal Growing/Freeze Dryers
|
| Heated 700 Series Specifications |
| Model 764 |
Temperature controlled to 45°C |
| Model 769 |
Temperature controlled to 100°C |
| Model 774 |
Temperature controlled to 123°C |
| Type of Pressure |
Absolute |
| Electrical Output (Voltage) |
0 to 10 VDC |
| Resolution |
0.005% of FS |
| Accuracy |
±0.15% of Reading + 005% of FS |
| Excitation |
±15 VDC ±5% Regulated to 1% |
| Pressure Ranges |
50 mTorr: Model 764 only
100 mTorr: Model 764 and 769 only
0 to 1, 2, 10, 100, 1000 Torr
1, 10, 100, 1000 Millibar/hPa |
| Thermal Effects |
- Compensated Range °C: +15 to +40
- Zero Shift: >1 Torr = 0.002% FS/°C
- <= 1 Torr = 0.005% FS/°C
Span Shift: ±0.02% Rdg/°C |
| Media |
Gases compatible with Inconel® |
* Specifications subject to change without notice.
If you don't see what you need here, please contact us.
;)
