Transmetteur de vide chauffé série 700 (Models 764/769/774)
Fabricant: Setra
These pressure transducers offer integral heated sensors and electronics, temperature controlled to your choice of 45°C, 100°C, or 123°C. Designed to safeguard against process contamination and improve the integrity of your process, these pressure transducers exhibit exceptional performance. These units offer an accuracy of ±15% of Reading with a resolution of 0.005% of Full scale in pressure ranges as low as 50 mTorr up to 1000 Torr.
Applications
Plasma Deposition/Etch
Sputtering/PVD/RTP
Industrial CVD/Ion Implantation
LPCVD
Crystal Growing/Freeze Dryers
Heated 700 Series Specifications
Model 764
Temperature controlled to 45°C
Model 769
Temperature controlled to 100°C
Model 774
Temperature controlled to 123°C
Type of Pressure
Absolute
Electrical Output (Voltage)
0 to 10 VDC
Resolution
0.005% of FS
Accuracy
±0.15% of Reading + 005% of FS
Excitation
±15 VDC ±5% Regulated to 1%
Pressure Ranges
50 mTorr: Model 764 only 100 mTorr: Model 764 and 769 only 0 to 1, 2, 10, 100, 1000 Torr 1, 10, 100, 1000 Millibar/hPa
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