Setra’s Model 730 is a high accuracy capacitance manometer (also referred to as Capacitance Diaphragm Gauge (CDG)), for measuring low vacuum pressure ranges that are critical to the control of the processes in photovoltaic, semiconductor and industrial markets. Its 0.5% of reading accuracy and precise resolution make the 730 the preferred choice over the competition. The 730 utilizes all Inconel® wetted material which enables it to be used with the aggressive media in semiconductor processes. The direct measurement design of the 730 provides accurate measurements of the media regardless of the composition of the gas mixture in the application.
High Performance for Demanding Applications - The Model 730 capacitance manometer uses a single diaphragm variable capacitance sensing element for demanding semiconductor and industrial vacuum applications. Its percent of reading accuracy, high resolution and wide dynamic range, make the 730 an idea fit for critical manufacturing processes.
Versatile Compatibility with Inconel® Design - The 730 is designed using Inconel® for all its wetted parts. Inconel® is highly resistive to the corrosive media used in semiconductor and industrial vacuum processes. Their material, along with the all welded construction, ensures long life within the application.
Direct Pressure Measurement - The Model 730 is designed with a diaphragm that measures pressure changes directly at the point of use. Unlike other capacitance manometers in the industry, the 730 measures direct pressure; it is independent of the gas mixture being measured. This enables the 730 to have higher accuracy than a manometer that can only measure indirect pressure.
• High Accuracy: ±0.25% of Reading
• Tensioned Diaphragm Provides Superior Performance
• Wide Compensated Operating Temperature
• Fast Response Time With Low Circuit Noise
• Not Sensitive to Environmental Changes
• Exceptional Overpressure Design
• Chemical Resistive Inconel® Design
• Precise Low Vacuum Measurements
• Application Specific Pressure Fittings
• CE & RoHS Compliant
• Semiconductor Process Chambers
• Plasma Sterilizers
• Vacuum Packaging