NanoAir™ 10 Aerosol Particle Counter
Provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter
The NanoAir™ 10 Condensation Particle Counter (CPC) is a revolutionary new product from Particle Measuring Systems (PMS). It provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Designed to monitor ultra-clean environments, it delivers 10 nm detection sensitivity at a sample flow rate of 2.8 L/min (0.1 CFM).
The NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7, 365 days continuous operation without the need for maintenance or user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.
A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences.
Additionally, the NanoAir is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.
• The small form factor (16.5 x 20.2 x 15.2 cm) sets the standard for CPC’s designed for manufacturing and process control applications
• External volumetric size is over 80% smaller than the next smallest industrial CPC allows monitoring:
• within process tools in the most critical functional areas
• on congested high-pressure gas distribution utility pads
• Patent-pending, innovative, working fluidics design allows for 24x7x365 days operation without working fluid maintenance; thus avoiding any sampling and data collection interruptions
• Refills only 1x per year at annual calibration, capable of 15 months between refills with 24x7 full-time operation
• No potential for unwanted fluid migration during shipping, handling, and installation that is common in other industrial-application CPCs
• Ready for operation in under 20 minutes after connecting vacuum and power
• No internal pumps or fans, eliminating maintenance and potential particle generation
• Sample flow rate of 2.8 LPM and does not use sheath airflow, providing volumetric sampling capability
• Zero Count is < 1.5 counts/m3 without the use of zero count subtraction schemes
• Results in best-in-class performance and enables use in ISO Class 1 environments
| PMS NanoAir™ 10 Aerosol Particle Counter - Data sheet 1.3 MB |