OEM Basis 2.0 Flow Meters/Controllers
deliver fast and accurate gas flow control in a compact, economical package
| Full-scale flow ranges | 100 SCCM to 20 SLPM |
| Fluids | Air, N2, O2, CH4, He, H2, Ar, CO2, N2O |
| Accuracy | As good as ±1.5% reading or ±0.2% full scale, gas dependent |
| Measurment & control ranges | 0.1% – 100% of full scale (1,000:1 turndown) |
| Flow repeatability (2σ) | ±0.25% of reading or ±0.05% of full scale |
| Sensor Response Time | < 6 ms |
| Control response time | As fast as 100 ms |
| Operating Temperature | 0 – 50°C |
| Operating Pressure | 0 – 145 PSIG |
| Humidity | 0 – 95% non-condensing |
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