AirSentry II Airborne Molecular Contamination Monitoring
Airborne Molecular Contamination Monitoring: AirSentry® II
AirSentry II Mobile
Designed to enhance fixed AMC monitoring programs, the AirSentry II Mobile AMC Detection System is the first truly mobile system for monitoring airborne molecular contamination in cleanrooms. Mobility plays an important part in a strategic AMC monitoring program, allowing contamination sources to be quickly located, quantified and eliminated.
A local touch PC on the mobile cart provides instant feedback of AMC levels at each monitoring location. FacilityNet software provided data storage and graphical displays in real-time while monitoring the specific environment
Onboard, chemically filtered, clean dry air (CDA) and vacuum are supplied within the cart enclosure to ensure that the analyzers can sample immediately upon relocation without long analyzer warm-up times incurred by competitive systems
AirSentry II Point-of-Use Ion Mobility Spectrometer
the AirSentry II family of ion mobility spectrometers detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species, With parts-per-trillion (ppt) sensitivity, these point-of-use sensors provide fast response, increased detection selectivity and repeatable performance.
Combining AirSentry II sensors with a central software platform allows for easy data acquisition and analysis. The AirSentry II family of sensors provide continuous actionable data, to enable efficient response to contamination sources and events.
AirSentry II Multi-point Monitoring System
The Airsentry II Multi-point Monitoring System in the most advanced airborne molecular contamination (AMC) monitor available, utilizing sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. The system features a 16- or 30-point manifold sampling system and an onboard industrial computer with secure software and communications.
In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic AMC monitoring program.
AirSentry II Mobile
- Pinpoint AMC issues in real-time, by identifying contamination sources
- Characterize AMC levels in multiple areas of large cleanrooms
- AMC analyzers available where and when needed, to deploy anytime
- Continuous actionable data in the process tool and facility
- High-sensitivity AirSentry II ion mobility spectrometry (IMS) analyzer detect acids, amines, ammonia and chlorides
- Mobile cart - move the system quickly to high-priority sample locations
- Onboard compressor, air-dryer, chemical filter and vacuum pump
- Battery back-up enable uninterrupted sampling, even during transport
- Touch PC and software display real-time and historical concentration data
- Optional wireless data communication
AirSentry II Point-of-Use Ion Mobility Spectrometer
- Continuous AMC monitoring of critical locations
- Robust and reliable data acquisition, control and analysis
- Long-term data stability
- Lowest cost-per-test
- High-sensitivity detection of acids and bases (amines, ammonia and chlorides)
- Versatile product configuration for point-of-use, multi-point and mobile monitoring applications
- Compact size allows placement in any location
- Ethernet, RS-232, 4-20 mA outputs
AirSentry II Multi-point Monitoring System
- Low cost-per-sample point
- Detects multiple AMC compounds, as specified by the user
- Programmed monitoring to detect AMC events and trends
- Compact size
- Versatile configuration of testing locations
- Monitors up to 30 sample locations
- Features AirSentry II ion mobility spectrometry (IMS) sensors-sensitive, reliable, repeatable
- Detection of low concentrations of acids, amines, ammonia and chlorides
- Calibrations traceablee to the National Institute of Standards and Technology (NIST)
- Real-time graphical software
- Industrial PC for robust and reliable operation in production environments
- Slide-out keyboard and display for convenient interface
AirSentry II Mobile
- Troubleshooting and spatial identification of contamination sources
- Isolation and verification of AMC events detected by multi-point monitoring systems
- Testing of AMC levels within minienvironments and process tools
- Testing and validation of chemical filtration performance
AirSentry II Point-of-Use Ion Mobility Spectrometer
- Real-time corrosion monitoring within etch process locations
- Real-time amine and ammonia monitoring within critical lithography systems
- Quantification of chemical filter efficiency
- Tracking and troubleshooting of contamination sources throughout cleanroom and in process tools
- Analysis of contamination within FOUP wafer storage modules
AirSentry II Multi-point Monitoring System
- Multi-point cleanroom and process bay monitoring
- Baseline and qualification of AMC levels in new cleanrooms
- Analysis and quantification of chemical filter efficiency
- Characterization of AMC contribution from makeup and recirculation air