20 nm particle detection for hazardous-area solvent monitoring
With 20 nm particle sensitivity and hazardous-area certifications, the Particle Measuring Systems Chem 20™ SM Chemical Particle Counter enables continuous inline monitoring of critical solvent chemistries used in advanced semiconductor manufacturing. Designed for solvents such as IPA and PGMEA, the Chem 20 SM eliminates the need for the complex, customer-built containment enclosures traditionally required for hazardous solvent monitoring.
Advanced particle detection technology, built-in safety features, and a compact inline design enable reliable contamination monitoring in hazardous environments. Continuous local and remote data access provides real-time visibility into particle levels while supporting global hazardous-area requirements.
Semiconductor manufacturers and chemical suppliers can detect contamination closer to the process, helping identify yield-limiting particle events before they impact production. By combining 20 nm particle detection with hazardous-area certification, the Chem 20 SM simplifies deployment while maintaining critical contamination control.
- Designed and built to monitor solvents in hazardous environments
- Sample flow conditioners improves count data on high molecular scattering events
- Inline monitoring to identify yield limiting events
- Compact and cost effective, requiring less space for ease of installing and relocating
- React quickly to particle excursions long before surface scan or yield data are available
- Multiple safety features for peace of mind
- Certified for IECEx, ATEX, NFPA NEC 70 Cl1 Div2, KCs Ex, TS Ex
- Purged unit with smaller dimension than regular counter in secondary containment box solution
- Flow sensor and leak detector to shut o… laser and flow
- Contained leakage with suitable drainage
- Built-in bubble separator and pressure regulator
- Optimized design for IPA and PGMEA . Can be tested for other solvents to find e…ectiveness
- 24/7 monitoring with data available through local display and remote data logger
- Built-in thermal electric cooler keeps internal environment stable
- Flexible communications systems support legacy data acquisition systems
- Hazardous environments
- Real-time particle monitoring for solvent chemicals
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Chemical QA and verification
- Performance testing of chemical handling components