Filters and Elements

Alicat mass flow meters and controllers require gases to be clean and free from particulates larger than 5-50 microns, depending upon the instrument’s flow range. Our in-line sintered filters prevent particulates larger than this from entering the measurement head of the instrument.  We recommend the following maximum particulate sizes for your mass flow instrument:
• Flow ranges of 0-1 sccm or less: max 5 μm
• Flow ranges between 0-2 sccm and 0-500 sccm: max 20 μm
• Flow ranges of 0-1 slpm or more: max 50 μm
 

In-Line Filters
Our in-line filters screw directly into the threaded inlet process connection of your mass flow meter or mass flow controller. Use the following filter recommendation based on your mass flow instrument’s port size and full-scale range.  Filter elements are not removable in the #10-32 UNF size:
• #10-32 UNF, 0-1 sccm or less - 510053 (5 µm)
• #10-32 UNF, 0-2 sccm to 0-50 sccm - 510054 (20 µm)

The filters for NPT process connections feature user-accessible filter elements that may be purchased separately for replacement:
• 1/8" NPT, 0-100 sccm to 0-20 slpm - ILF-1/8-20 (20 µm)
• 1/4" NPT, 0-50 slpm to 0-100 slpm - ILF-1/4-40 (40 µm)
• 1/2" NPT, 0-250 slpm - ILF-1/2-40 (40 µm)
• 3/4" NPT, 0-500 slpm to 0-2000 slpm - ILF-3/4-40 (40 µm)


Sintered Filter Elements
These sintered filter elements replace the elements that come with our ILF filters. Each filter element replacement includes fresh O-rings. Filter elements are available in the following sizes:
• 1/8" NPT (ILF-1/8-20) - ILFE20 (20 µm)
• 1/4" NPT (ILF-1/4-40) - ILFE40 (40 µm)
• 1/2" NPT (ILF-1/2-40) - ILFE40L (40 µm)
• 3/4" NPT (ILF-3/4-40) - ILFE40L (40 µm)