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Particle Measuring Systems

HPGP101-C Ultra High Purity Gas Particle Counter

Ultra High Purity Gas Particle Counter: HPGP™ 101-C

Have questions? We're here to help!
Have questions? We're here to help!

High-technology manufacturing processes often require high-purity gases. The HPGP 101-C provides reliable in-line contamination monitoring for process gases at line pressure.   

The HPGP is compatible with most non-toxic gases and can be used in many reactive gas monitoring applications.   

The PDS-E (Particle Data System - Ethernet) instrument collects and reports data captured by the HPGP 101-C probe.

  • Reduced Cost
    • Speed qualification of process gas distribution systems
    • Detect particles in gases before they impact yield
    • Compatible with oxygen, hydrogen, and most non-toxic gases
  • Improved Process Control
    • Verify gas quality
    • Detect process upsets
    • Quantify impact of system changes
    • Accurate particle sizing
    • Facility Net data management software for comprehensive data storage, management, reports and alarms
  • Reliable
    • Passive cavity design requires infrequent maintenance
    • Inert gas purge ensure safety
    • Leakage of sample gas to vessel discontinues power to electronics
  • 0.1 µm sensitivity at 0.1 SCFM
  • 8 particle channels
  • Line pressures from 40 to 150 psig
  • Passive laser cavity
  • Parallel processing array detector system
  • Safety containment vessel
  • Oxygen and hydrogen compatibility
  • CE and RoHS 2 compliant

 

HPGP101-C
Size channels8 channels with thresholds at: 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0 µm
Sample Rate0.1 SCFM (2.8 LPM) (=total volumetric flow rate)
Counting efficiency> 50% at 0.14 µm
Zero count level< 2/ 3 or < 0.2/min
Maximum concentration3,000/ 3
Laser typeHeNe
CalibrationTraceable to the US National Institute of Standards and Technology (NIST).
Power100, 115, 220 – 230, or 230 – 240 V, 50 – 60 Hz, 0.5 A
EnvironmentTemperature: 32 – 113 °F (0 – 45 °C). Humidity: non-condensing. Maximum altitude: 9,842 (3,000 m).
Dimensions (l, w, h)26 x 8 x 9 in (66 x 20 x 22 cm)
Weight45 lb (20.4 kg)
ComplianceCE, RoHS 2
PDS-E (Data Interface)
Number of sensorsSupports 1 HPGP unit per PDS-E
Sampling interval1 sec to 8 hr
Computer interfaceRS-232, bi-directional; Ethernet (via PMS protocol, Modbus, or OPC)
Power100 – 240 VAC, 50 – 60 Hz, 0.63 A
EnvironmentTemperature: 32 – 113 °F (0 – 45 °C), Humidity: non-condensing, Maximum altitude: 9,842 (3,000 m)
Dimensions7 x 8.5 x 12.5 in (18 x 22 x 32 cm)
Weight11.5 lb (5.2 kg)
  • Qualification of gas distribution systems
  • Process gas monitoring
  • Reactive gas monitoring

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