NanoAir 10 Condensation Particle Counter
Condensation Particle Counter CPC NanoAir™ 10
The NanoAir™ 10 is a revolutionary new aerosol nanoparticle counter o ering the sensitivity of a Condensation Particle Counter (CPC) with the ease of use of traditional cleanroom particle counters. The NanoAir is designed to monitor ultra-clean environments and provides 10 nm detection sensitivity at a sample flow rate of 2.8 LPM. The instrument is small enough for use in semiconductor process tools and Equipment Front-End Modules. The innovative working fluid handling system design is robust and e icient for 365 days of 24/7 continuous operation without the need for user intervention of any kind. A 10-port manifold companion (ParticleSeeker™) product is available for use in applications that require multiple sample locations to be monitored in programmed sequences or in pseudo-simultaneous ensemble fashion. Finally, the NanoAir is compatible with high-pressure inert gas when used in conjunction with PMS’ High Pressure Di user HPD III. Data can be viewed using PMS FacilityNet Facility Monitoring Soware or transmitted directly to third party SCADA systems or process tool inputs.
The NanoAir is a purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces in the following applications:
NanoAir: Point of Use (POU) Monitor
• The NanoAir can be used to monitor a single sample point 24/7, 365 days/year providing truly continuous and real-time particle activity.
• Its compact size makes it suitable for use in the most critical process areas.
• In stand-alone point of use applications, NanoAir will support sample tube lengths up to 10 m.
ParticleSeeker: Monitoring inside process tool Equipment Front End Module (EFEM) mini-environments
• The ParticleSeeker is a companion, multi-point aerosol sampler for the NanoAir, providing up to 10 distributed sample locations. This capability is ideal for applications requiring broad contamination monitoring with programmed sample point monitoring critical surfaces within the cleanest and most confined spaces in the fab
. • Up to 6 meters of sample tubing can be used for each manifold port. The ParticleSeeker and NanoAir provides the ability to monitor up to 120 m2 of space
HPD-III: High pressure inert gas monitoring
• Using the NanoAir particle counter with PMS’s HPD III (High Pressure Di user) enables real-time, continuous, high sensitivity measurement of high pressure bulk gases.
- The small form factor (16.5 x 20.2 x 15.2 cm) sets the standard for CPC's designed for manufacturing and process control applications
- External volumetric size is over 80% smaller than the next smallest industrial CPC allows monitoring
- within process tools in the most critical functional areas
- on congested high-pressure gas distribution utility pads
- Patent-pending, innovative, working fluidics design allows for 24x7x365 days operation without working fluid maintenance; thus avoiding any sampling and data collection interruptions
- Refills only 1x per year at annual calibration, capable of 15 months between refills with 24x full-time operation
- No potential for unwanted fluid migration during shipping, handling, and installation that is common in other industrial-application CPCs
- Ready for operation in under minutes after connecting vacuum and power
- No internal pumps or fans, eliminating maintenance and potential particle generation
- Sample flow rate of 2.8 LPM and does not use sheath airflow, providing volumetric sampling capability
- Zero Count is < 1.5 counts/m3 without the use of zero count subtraction schemes
- Results in best-in-class performance and enables use in ISO Class 1 environments
| Size range | 10 nm (minimal detectable size @ D50) |
| Aerosol flow rate | 2.8 LPM (0.1 CFM) ± 5% |
| Sampling period | 0.2 to 3600 seconds, user-selectable |
| Max. particle concentration | 200,000 #/ 3 @ 10% coincidence loss |
| Zero count | < 1.5 #/m3, No false count subtraction |
| Volumetric sample % | 100% - no sheath flow |
| Counting efficiency | 10 nm = 50% ± 20%, 15 nm = 100% ± 10% |
| Calibration | yearly |
| Instrument warm-up time | 20 minutes, nominal |
| Working fluid | Organic, non-toxic, non-flammable 240 ml total working fluid volume |
| Working fluid consumption and instrument volume | 12 months between refills 240 ml total working fluid volume |
| Sample tubing | Static Control Polyurethane Tubing 6 mm OD, 4 mm ID (PMS P/N: 1000026711) |
| Sample tubing length | ≤ 10 m (33 feet) |
| Laser classification | Class 1, complies with US 21 CFR 1040.10 and EN60825-1. Internally an enclosed Class 3B laser is used per EN60825-1. |
| Data storage | >10,000 samples |
| Dimensions (l,w,h) | 8.0 x 6.0 x 6.5 in (20.3x 15.2 x 16.5 cm) |
| Weight | 6.1 lb (2.8 kg) |
| LED Indication | Power, flow error, laser error, activity, working fluid level |
| Power | External AC to DC Power Supply: Input: 100 – 240 VAC, 50/60 Hz, 1.5 A Output: 24 VDC 5.0 A AC input voltage fluctuation shall not exceed ± 10% |
| Communications | • Ethernet connectivity (PMS Proprietary) • Modbus via TCP/IP • Serial USB • 4-20mA (4 analog input ports, 2 analog output ports) • Dry contact relays (4) |
| Operating temperature range | 50 – 90 °F (10 – 32 °C) |
| Humidity range | 0 – 60% RH, non-condensing |
| Vacuum source | External, ≥ 12 inHg required, 2.1 CFM (0.1 CFM for sample flow & 2.0 CFM for cooling flow) |
| Power | 24 VDC, 5 Amp |
| Installation requirements (with external AC to DC power supply) | • Indoor use only • Pollution degree 2 • Over voltage category • Ordinary protection (not protected against harmful ingress of moisture) • External AC to DC Power Supply • Over voltage category II • Class I Equipment (Electrical earth ground from the mains power source to the product inputs is required for safety) |
| Status Indicators | • Power button LED ring (4-color, operational states) • Front edge and corer LED (4-color, operational states) • Working fluid level indicator (8 level real-time detection |