MCE / MCV Series Vacuum Gas Mass Flow Controller

Easy upgrade for aging or underperforming thermal flow controllers

Starting at

$3,048.00CAD

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MCE MCV Series Vacuum Gas Mass Flow Controller 01191

Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4 in VCR fittings and matches end to end with SEMI standard MFCs. Alicat MCE mass flow controllers are built with a proportional valve positioned within the base of the unit.

The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions. Alicat’s MCV mass flow controllers are designed for applications that require tight shut-off such as vacuum coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides positive shut-off of 1 x 10^-9 atm scc/s Helium max.

The MCE and MCV controllers are also available for use with aggressive or corrosive gases (MCES and MCVS), where the valve is upgraded to 303 stainless steel, the sensor to 316L stainless steel, and the elastomers to FFKM to withstand corrosion.

Alicat MCE and MCV series of vacuum gas mass flow controllers can be custom built with your choice of options. Choose your communications protocol, display, process connections, elastomers, flow totalizer, and calibration. Need further customization? Contact us and we’d be happy to help you build the instrument you need.

Each flow controller comes with a NIST-traceable calibration certificate and an Alicat operating manual. Power supply sold separately.

• 50-100 ms speed of response stills upstream fluctuations
• Accessible PID valve tuning for best speed and stability
• Custom valve orifice sizing yields full-range stability
• Control mass flow, volumetric flow or absolute pressure with one device
• No warm-up: ready to control process flows in one second
• Patented differential pressure-based flow measurement technology
• Numerous user-selectable engineering units
• Includes COMPOSER™ gas composition firmware

Maximum Available Range	0 - 20 slpm
Minimum Available Range	0 - 0.5 sccm / 0 - 500 sμlm
Turndown Ratio	MCE + MCV: 200:1 MCES + MCVS: 100:1
Standard Accuracy Calibration	± (0.8% of the reading + 0.2% of FS range)
Optional High-Accuracy Calibration	± (0.4% of the reading + 0.2% of FS range)
Repeatability	0.2% of FS range
Typical Control Response Time	50 - 100 ms (as low as 25 ms with PID tuning)
Pneumatic Valve Leak Integrity (MCV Only)	1 x 10^-9 atm scc/s Helium max
Compatible Gases	MCE + MCV: 98 MCES + MCVS: 130
Operating Temperature	-10°C - 60°C
Max Internal Pressure (Static)	145 PSIG (160 PSIA)
Proof Pressure	175 PSIG (190 PSIA)
STP/NTP Default	25°C & 1 atm STP/0°C & 1 atm NTP
Ingress Protection	IP40
Wetted Materials	MCE + MCV: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass, PCTFE (MCV only) MCES + MCVS: 316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neoprene as needed for some gases
Valve Options	MCE: small proportional control valve mounted internally MCV: small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream